| 摘要 |
PROBLEM TO BE SOLVED: To measure not only the height of outermost layer, but also the height of the upper surface (or lower surface) of the other layers of an inspection object, constituted by forming a transparent or translucent material layer on a material layer, in a single scanning/imaging process. SOLUTION: In the height measuring device, constituted to calculate the height of an inspection portion from the height position of focus plane FS obtained corresponding to initially detected light quantity peak, after initiating reading of scanned image from a memory device 32, the order of reading the scanned images is set either to the normal order or the reverse order of the gained order of the scanned images. COPYRIGHT: (C)2006,JPO&NCIPI
|
