SUBSTRATE CONVEYING METHOD AND SUBSTRATE CONVEYING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a substrate conveying method and a substrate conveying device capable of smoothly conveying a large substrate inclined at a large angle by reducing inconsistency of inclined conveyance associated with an increase in size of the substrate. SOLUTION: The substrate conveying device 10 to convey a substrate 11 with an angle of inclination with respect to the horizontal plane has a substrate curving and supporting means 14 to curve the substrate 11 to be conveyed so as to have the curvature in the conveying direction, and the substrate curving and supporting means 14 includes a substrate back side supporting means 15 and a substrate lower end supporting means 16. COPYRIGHT: (C)2006,JPO&NCIPI