SELF-SENSING ARRAY OF MICROCANTILEVERS FOR CHEMICAL DETECTION

摘要

The invention provides a chemical detection system (10) for detecting at least one target chemical species (12), including a self-sensed cantilevered probe array (20) having a plurality of self-sensed cantilevered probes (30), at least one chemical-sensitive coating material (34) applied to at least one cantilevered probe (30) in the cantilevered probe array (20), and an interface circuit (40) that is coupled to the cantilevered probe array (20). At least one cantilevered probe (30) in the cantilevered probe array (20) exhibits a shifted cantilevered probe response when the cantilevered probe array (20) is exposed to the target chemical species (12) and the interface (40) circuit actuates the cantilevered probe (30). A handheld chemical detection system and a method of operation are also disclosed.