HOLOGRAM AND METHOD OF MANUFACTURING AN OPTICAL ELEMENT USING A HOLOGRAM
摘要
A method of manufacturing an optical element (5) comprises testing an optical surface (3) of the optical element, using an interferometer Ia directing measuring light (23a) onto the optical surface wherein the measuring light traverses two successive holograms (44, 48) disposed in the beam path of the measuring light upstream of the optical surface.
申请公布号
WO2006077145(A2)
申请公布日期
2006.07.27
申请号
WO2006EP00518
申请日期
2006.01.20
申请人
CARL ZEISS SMT AG;HETZLER, JOCHEN;BEDER, SUSANNE;FELDMANN, HEIKO