发明名称 |
Experiment management system and method thereof in semiconductor manufacturing environment |
摘要 |
A system and method thereof for experiment management. A storage device stores an experiment plan record, a merge constraint and an integration rule. A processing unit configured to acquire a first experiment plan from the experiment plan record, and a second experiment plan. The processing unit generates an integrated experiment plan by merging the first experiment plan and the second experiment plan according to the merge constraint and the integration rule, and stores the integrated experiment plan to the storage device.
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申请公布号 |
US2006167578(A1) |
申请公布日期 |
2006.07.27 |
申请号 |
US20050043143 |
申请日期 |
2005.01.27 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. |
发明人 |
KUO WEN-CHANG;HUANG CHIEN-CHUNG;YANG HUEI-WEN;HUANG YI-LIN |
分类号 |
G06F19/00 |
主分类号 |
G06F19/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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