| 摘要 |
PROBLEM TO BE SOLVED: To provide a hard coating having excellent adhesion, excellent oxidation resistance and wear resistance, and particularly having excellent lubrication and breakage resistance, and to provide a method for forming the same. SOLUTION: In the hard coating formed by a physical deposition process, the hard coating comprises at least one metal element selected from the group consisting of transition metal elements of Groups 4a, 5a and 6a in the Periodic Table, Al, Si and B, and at least one non-metal element selected from the group consisting of S, O, N and C (S is indispensable), and having a columnar structure, in which crystal grains have a multi-layer structure having pluralities of layers having different S contents with interlayer boundary regions through which crystal lattice stripes are continuous, each layer having a thickness T (nm) of 0.1 to 100 nm. Regarding its forming method, evaporation sources in arc-discharge ion plating and magnetron sputtering are simultaneously discharged in one and the same chamber. COPYRIGHT: (C)2006,JPO&NCIPI
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