INITIAL CHARGING METHOD AND DEVICE OF FUNCTIONAL LIQUID DROPLET DISCHARGE HEAD, FUNCTIONAL LIQUID DROPLET DISCHARGE HEAD, FUNCTIONAL LIQUID SUPPLY DEVICE, LIQUID DROPLET DISCHARGE DEVICE, MANUFACTURING METHOD OF ELECTRO-OPTICAL DEVICE, ELECTRO-OPTICAL DEVICE, AND ELECTRONIC EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide an initial charging method and the like of a functional liquid droplet discharge head preventing bubbles from remaining in the head with a simple method at the initial charging time. SOLUTION: In this initial charging method of the functional liquid droplet discharge head 3, a charge liquid 68 consisting of the functional liquid or its solvent is initially charged in a passage inside the functional liquid droplet discharge head 3 discharging the functional liquid droplets to a work. The method comprises processes for: sealing functional liquid introducing ports 51 of the functional liquid droplet discharge head 3 continuing to the passage inside the head 3; dipping the functional liquid droplet discharge head 3 in the charge liquid 68 stored in a sealed vessel 71; reducing pressure for venting atmosphere in the vessel 71 by reducing pressure inside the vessel 71 to a given vacuum; and recovering pressure inside the vessel 71. COPYRIGHT: (C)2006,JPO&NCIPI