CLEANING LIQUID OF PRECISION SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a cleaning liquid used for cleaning a precision substrate capable of preventing a dissolution of a material of the precision substrate caused by the OH-ion existing in the cleaning liquid, and capable of realizing the smooth surface of the precision substrate. SOLUTION: An organic solvent with a water molecule and a hydrogen molecule associated is added to the cleaning liquid of the precision substrate. A behaivior of the water molecule in the water formes the assembly of water molecule comprising a couple of water molecules to a good many of 50 water moleules. COPYRIGHT: (C)2006,JPO&NCIPI