| 摘要 |
PROBLEM TO BE SOLVED: To provide a microscopic observation device removing liquid supplied to the observing point of a substrate without leaving it in the case of using an immersion objective. SOLUTION: The microscopic observation device is equipped with: an immersion microscope 20 equipped with a supporting means (stage part) supporting the substrate 10A being an observation object and the immersion objective; and a blower means (fan 16A of a fan filter unit) drying the liquid 28 by making air blow off to the liquid 28 and/or the periphery of the liquid 28 supplied to the observing point of the substrate at the time observing the substrate by using the objective. COPYRIGHT: (C)2006,JPO&NCIPI
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