摘要 |
PROBLEM TO BE SOLVED: To provide a method and a structure capable of easily preparing a ceramic, metal, glass, or resin electronic and electric member which needs to have an arbitrary resistance. SOLUTION: An arbitrary ceramic, metal, glass, or resin substrate is impregnated or coated with a peroxo-containing ceramic precursor, and the ceramic precursor is fired and crystallized at an arbitrary temperature to attain an arbitrary volume resistivity and an arbitrary surface resistivity. In particular, such substrate is impregnated or coated with a peroxo-containing ceramic precursor, and the ceramic precursor is crystallized to obtain an insulation structure in which the substrate of a volume resistivity of 10<SP>8</SP>to 10<SP>12</SP>Ωcm and the formed surface resistance layer has a surface resistivity of 10<SP>7</SP>to 10<SP>11</SP>Ω/square. Here, the volume resistivity can be adjusted by the porosity and firing temperature of the substrate, and the surface resistivity can be adjusted by mainly the firing temperature. COPYRIGHT: (C)2006,JPO&NCIPI
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