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经营范围
发明名称
A WAFER POLISHING MACHINE
摘要
申请公布号
KR100609010(B1)
申请公布日期
2006.07.27
申请号
KR20050021286
申请日期
2005.03.15
申请人
KOREA INSTITUTE OF MACHINERY & MATERIALS
发明人
SONG, CHANG KYU;LEE, HU SANG;PARK, CHUN HONG;LEE, HO CHEOL
分类号
H01L21/304;H01L21/302
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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