| 摘要 |
PROBLEM TO BE SOLVED: To attain a predetermined magnetic field stably by preventing a magnet from having a high temperature even if it is subjected to radiation heat from a substrate mounting table. SOLUTION: A substrate mounting table is provided in a reaction chamber and a heater for heating the substrate is buried in the substrate mounting table. A tubular electrode 215 is arranged on the outer circumference of the reaction chamber. A magnet 216 is arranged in contact with the outer circumference of the tubular electrode 215. A channel 106 for feeding refrigerant medium is formed in the tubular electrode 215. The wall of the reaction chamber corresponding to at least such parts, where the tubular electrode 215 and the magnet 216 are arranged on the outer circumference, is composed of quarts. COPYRIGHT: (C)2006,JPO&NCIPI
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