| 摘要 |
PROBLEM TO BE SOLVED: To provide an ozone water jet nozzle capable of jetting out ozone water to nearly the entire surface of the treatment surface of a substrate efficiently. SOLUTION: In the ozone water jet nozzle used when removing resist on a substrate surface using ozone water, a plurality of jet holes are formed at positions corresponding to the entire surface of the treatment surface of the substrate, the distance between adjacent jet holes is 10 mm or smaller, and the jet holes are arranged so that the traces drawn by points corresponding to the center of the jet holes do not overlap on an arbitrary plane vertical to the jetting direction of the ozone water when the ozone water jet nozzle is rotated in a direction vertical to the jetting direction of the ozone water. COPYRIGHT: (C)2006,JPO&NCIPI
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