发明名称 METHOD FOR PRODUCING LASER BEAM-MACHINED PRODUCT, AND PROTECTIVE SHEET FOR LASER BEAM MACHINING
摘要 <P>PROBLEM TO BE SOLVED: To provide a method for producing a laser beam-machined product using a protective sheet for laser beam machinjng by which the surface of a work can effectively be suppressed from being contaminated with decomposed matters when the work is machined by the light absorption ablation of a laser beam and a machining precision can be enhanced, and to provide the protective sheet for the method which is used for producing the laser beam-machined product. <P>SOLUTION: This method uses the protective sheet for laser beam machining which comprises at least an protective layer on a base material and in which the ratio of absorbancy indexes, that is, the ratio of the absorbancy index in the wave length of 532 nm of the protective sheet to the absorbancy index in the wavelength of 532 nm of the used work is <1. The method comprises: a step of sticking the protective layer of the protective sheet to a laser beam emitting surface side of the work; a step of machining the work by the irradiation of the laser beam; and a step of peeling the protective sheet from the machined work. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006192478(A) 申请公布日期 2006.07.27
申请号 JP20050007370 申请日期 2005.01.14
申请人 NITTO DENKO CORP 发明人 MATSUO NAOYUKI;URAIRI MASAKATSU;HINO ATSUSHI
分类号 B23K26/18;B28D5/04;H01L21/301 主分类号 B23K26/18
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