| 摘要 |
PROBLEM TO BE SOLVED: To discourage a pad 20 from coming off the arm of a substrate carrier. SOLUTION: The substrate carrier comprises an arm for carrying a glass substrate, and a plurality of pads 20 which are fitted to an arm member 16 of the arm with a screw and support the glass substrate. A wavy washer 26 is interposed between the pad 20 and the arm member 16. COPYRIGHT: (C)2006,JPO&NCIPI
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