| 摘要 |
PROBLEM TO BE SOLVED: To provide a vaporizer capable of smoothly leading a material in the predetermined direction without raising any problem that a solid material or a liquid material is solidified or liquefied and stuffed during the vaporization. SOLUTION: Fullerene 101 is stored in a vaporization unit 107. A delivery part composed of a high-temperature maintaining chamber 203 and an outlet 106 is provided on an upper part of the vaporization unit 107. A wall 104 of the delivery part is formed of a material having the thermal conductivity higher than that of a wall part 102 of the vaporization unit 107. A first heater 103 wound around the outer periphery of the vaporization unit 107 is conducted to raise the temperature of the vaporization unit 107 to 400-600°C. A second heater 105 wound around the outer periphery of the high-temperature maintaining chamber 203 of the delivery part is also conducted to raise the temperature of the high-temperature maintaining chamber 203 to 600-800°C. The temperature of the high-temperature maintaining chamber 203 is uniformly expanded over the entire wall of the delivery part, vaporized fullerene gas is smoothly delivered without raising any problem that the vaporized fullerene gas is solidified or liquefied, and stuffed inside the outlet 106 or not delivered in the desired direction. COPYRIGHT: (C)2006,JPO&NCIPI
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