PROBE SCANNING ACROSS SUBSTRATE, PROBE CONFIGURATION, AND DATA STORAGE DEVICE (PROBE DEVICE FOR SCANNING ACROSS SUBSTRATE AND DATA STORAGE)

摘要

PROBLEM TO BE SOLVED: To provide a probe, for scanning across a substrate in which simple and accurate operation can be made, and a data storage device equipped with the probe. SOLUTION: The data storage device includes a storage medium for storing the data in a form of a mark and at least one probe for scanning across the storage medium. The probe includes, a spring cantilever (31) mechanically fixed to the probe holding structure during operation of the probe, a chip (32) equipped with a tip of a nanoscale, and an actuator for positioning the chip (32) in longitudinal direction. COPYRIGHT: (C)2006,JPO&NCIPI