发明名称 |
Mask material for reactive ion etching, mask and dry etching method |
摘要 |
To provide a dry etching method and the like that can precisely process regions targeted for etching of objects to be processed using reactive ion etching that uses carbon monoxide gas, to which a nitrogen-containing compound gas is added, as a reactive gas. A material containing silicon and tantalum is used to form a first mask layer 18 that covers a magnetic thin film layer 16.
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申请公布号 |
US2006166506(A1) |
申请公布日期 |
2006.07.27 |
申请号 |
US20050553677 |
申请日期 |
2005.10.17 |
申请人 |
TDK CORPORATION |
发明人 |
OKAWA SHUICHI;HATTORI KAZUHIRO |
分类号 |
C23F1/00;B44C1/22;C03C25/68;C23F4/00;G03F1/00;G11B5/84;G11B5/855;H01L21/3065;H01L21/461 |
主分类号 |
C23F1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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