发明名称 METHOD AND APPARATUS FOR FILM FORMATION ON TARGET
摘要 <p>This invention provides a method and an apparatus for film formation on a target that can solve a problem of prior art techniques which is indispensable to use reduced pressure for allowing ultrafine particles to collide against a target to form a film on the target. The apparatus for film formation on a target is characterized by comprising fine particles, a gas for accelerating the fine particles, and means for jetting the fine particles and the accelerating gas onto the target, a film being formed on the target by the above jetting of the fine particles. The method for film formation on a target is characterized by comprising the steps of selecting fine particles and jetting the selected fine particles and an accelerating gas on the target to form a film on the target. The above fine particles or first fine particles are ceramic particles or metal particles. Second fine particles are resin particles or metal particles. When the fine particles are ceramic particles, the ceramic particles are dentine component particles while the target is a tooth.</p>
申请公布号 WO2006078063(A1) 申请公布日期 2006.07.27
申请号 WO2006JP301259 申请日期 2006.01.20
申请人 KURIYAGAWA, TSUNEMOTO 发明人 KURIYAGAWA, TSUNEMOTO
分类号 C23C24/04 主分类号 C23C24/04
代理机构 代理人
主权项
地址