发明名称 |
METHOD FOR MANUFACTURING P-TYPE GROUP III NITRIDE SEMICONDUCTOR, AND GROUP III NIRIDE SEMICONDUCTOR LIGHT-EMITTING DEVICE |
摘要 |
An object of the present invention is to provide an efficient method for manufacturing a p-type group III nitride semiconductor that has adequate carrier concentration and a surface with a low occurrence of crystal damage. The inventive method for manufacturing a p-type group III nitride semiconductor comprises: (a) growing a group III nitride semiconductor containing a p-type dopant at 1000(C or higher in an atmosphere containing H2 gas and/or NH3 gas; and (b) after the growth of the group III nitride semiconductor, substituting the H2 gas and NH3 gas with an inert gas at a temperature higher than 800(C while reducing the temperature.
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申请公布号 |
KR20060085662(A) |
申请公布日期 |
2006.07.27 |
申请号 |
KR20067006741 |
申请日期 |
2006.04.07 |
申请人 |
SHOWA DENKO KABUSHIKI KAISHA |
发明人 |
KOBAYAKAWA MASATO |
分类号 |
C01G15/00;H01L21/20;H01L21/205;H01L33/00;H01L33/06;H01L33/32;H01L33/42;H01S5/323 |
主分类号 |
C01G15/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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