发明名称 |
PHOTO-MOLDED BODY AND METHOD FOR MANUFACTURING THE SAME |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a photo-molded body using a freely moldable triazinethiol derivative and a method for manufacturing the same. <P>SOLUTION: A fluorine-containing triazine derivative layer 2 is formed on a substrate 1. A mask 3 having light shielding portions 3a and transmission portions 3b is put on the fluorine-containing triazine derivative layer 2 and light 4 is illuminated, The fluorine-containing triazine derivative layer 2a irradiated with the light 4 through the transmission portions 3b is photopolymerized to a fluorine-containing triazine polymer. By scrubbing with a solvent such as ethanol, portions corresponding to the light shielding portions 3a of the mask 3 (portions excluding the photoirradiated fluorine-containing triazine derivative layer 2a) are removed, whereby a pattern is formed. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
申请公布号 |
JP2006194917(A) |
申请公布日期 |
2006.07.27 |
申请号 |
JP20050003404 |
申请日期 |
2005.01.11 |
申请人 |
ALPS ELECTRIC CO LTD;IWATE UNIV |
发明人 |
TAGUCHI YOSHIHIRO;MORI KUNIO;BABA MAMORU;HIRAHARA HIDETOSHI;KANO YOSHIAKI |
分类号 |
G03F7/038;G01N37/00;G03F7/027 |
主分类号 |
G03F7/038 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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