发明名称 PHOTO-MOLDED BODY AND METHOD FOR MANUFACTURING THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To provide a photo-molded body using a freely moldable triazinethiol derivative and a method for manufacturing the same. <P>SOLUTION: A fluorine-containing triazine derivative layer 2 is formed on a substrate 1. A mask 3 having light shielding portions 3a and transmission portions 3b is put on the fluorine-containing triazine derivative layer 2 and light 4 is illuminated, The fluorine-containing triazine derivative layer 2a irradiated with the light 4 through the transmission portions 3b is photopolymerized to a fluorine-containing triazine polymer. By scrubbing with a solvent such as ethanol, portions corresponding to the light shielding portions 3a of the mask 3 (portions excluding the photoirradiated fluorine-containing triazine derivative layer 2a) are removed, whereby a pattern is formed. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006194917(A) 申请公布日期 2006.07.27
申请号 JP20050003404 申请日期 2005.01.11
申请人 ALPS ELECTRIC CO LTD;IWATE UNIV 发明人 TAGUCHI YOSHIHIRO;MORI KUNIO;BABA MAMORU;HIRAHARA HIDETOSHI;KANO YOSHIAKI
分类号 G03F7/038;G01N37/00;G03F7/027 主分类号 G03F7/038
代理机构 代理人
主权项
地址