| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum pressure control system which can control pressure within a vacuum container in a simpler structure. SOLUTION: If a valve open degree control signal is transmitted from a valve open degree control circuit 30 to a pilot pressure adjustment mechanism 20, an air supply electromagnetic valve 16 is opened, and an exhaust air electromagnetic valve 18 is closed, a fluid is supplied from a volume booster 14 to a pilot room 36, and then a pilot pressure increases rapidly. Subsequently, a valve body 74 rapidly changes from the fully closed state to the fully opened state. On the other hand, if a valve open degree control signal is transmitted to the pilot pressure adjustment mechanism 20, and the air supply electromagnetic valve 16 is closed and the exhaust air electromagnetic valve 18 is opened, the volume booster 14 exhausts air from the pilot room 36. As a result, the pilot pressure decreases rapidly, and then the valve body 74 rapidly changes from the fully opened state to a desired open degree. COPYRIGHT: (C)2006,JPO&NCIPI
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