| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a decontamination system capable of simplifying the circuit constitution and being miniaturized while being provided with constitution capable of removing a hydrogen peroxide gas as a decontamination gas from a decontamination chamber. <P>SOLUTION: A cylindrical body 10 is provided inside a thick gas pipe 41 and a blowing fan 15 is provided inside the cylindrical body 10. Further, an elevating/lowering cylinder 21 is provided inside the cylindrical body 10 and a catalyst holder 23 holding a catalyst 30 through which a gas is made to pass can be elevated/lowered. In such constitution, at the time of decontamination, the catalyst holder 23 is elevated and a gas inflow opening 10a is made open so as not to be covered with the catalyst 30. In such a state, the hydrogen peroxide gas is blown into the decontamination chamber 3 without passing through the catalyst 30. On the other hand, at the time of aeration, the catalyst holder 23 is lowered and the gas inflow opening 10a is made to be shielded so as to be covered with the catalyst 30. In such a state, an indoor gas containing the hydrogen peroxide gas passes through a clearance d and the catalyst 30 and is blown into the decontamination chamber 3. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
