| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a highly reliable laminated piezoelectric ceramics element having a high piezoelectric characteristic, wherein inner-electrode layers having as their main component cheap copper whose melting point is higher than silver and a plurality of piezoelectric layers are so laminated alternately as to integrate them with each other and as to be able to sinter them at 950-1,050°C; and to provide a manufacturing method of the element. <P>SOLUTION: In the laminated piezoelectric ceramics element, inner-electrode layers 3 having as their main component cheap copper whose melting point is higher than silver and a plurality of piezoelectric layers 2 are so laminated alternately as to integrate them with each other, and as to make the residual carbon quantity contained in the laminate smaller than 350 ppm. Consequently, the reduction of the lead oxide of the main component of the ceramics which is caused by the residual carbon is so suppressed as to prevent the delamination (peeling) generated in the interface between the piezoelectric layer 2 and the inner-electrode layer 3. Further, the surface of the copper powder used in the conductive paste forming the inner-electrode layers 3 is so coated with a glass as to obtain the laminate prevented up to 400°C from being oxidized even in a nitrogen atmosphere. Consequently, the cheap and highly reliable laminated piezoelectric element 1 can be obtained. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
