| 摘要 |
PROBLEM TO BE SOLVED: To simplify a manufacturing method of a thin film transistor (TFT) substrate by using a transparent conductor material containing a specific metal for pixel electrodes and transparent electrodes. SOLUTION: This is a TFT substrate used in a display device and has a transparent substrate, pixel electrodes provided on the transparent substrate to control the pixels of the display device, and thin film transistors provided on the above transparent substrate to drive the pixel electrodes. The above thin film transistors include at least Al gate electrodes, gate insulator films, 1st semiconductor layers, 2nd semiconductor layers, and Al source-drain electrodes. The above pixel electrodes are in direct contact with the Al gate electrodes and/or Al source-drain electrodes and are made of conductive oxides consisting mainly of zinc oxides. Since no barrier metal is used between the transparent conductor film and the Al wiring, the manufacturing method is simplified that much. COPYRIGHT: (C)2006,JPO&NCIPI |
