METHODS, SYSTEMS AND COMPUTER PROGRAM PRODUCTS FOR CHARACTERIZING STRUCTURES BASED ON INTERFEROMETRIC PHASE DATA
摘要
Structure profiles from optical interferometric data can be identified by obtaining a plurality of broadband interferometric optical profiles of a structure as a function of structure depth in an axial direction. Each of the plurality of interferometric optical profiles include a reference signal propagated through a reference path and a sample signal reflected from a sample reflector in the axial direction. An axial position corresponding to at least a portion of the structure is selected. Phase variations of the plurality of interferometric optical profiles are determined at the selected axial position. A physical displacement of the structure is identified based on the phase variations at the selected axial position.
申请公布号
WO2006078839(A2)
申请公布日期
2006.07.27
申请号
WO2006US01936
申请日期
2006.01.20
申请人
DUKE UNIVERSITY;CHOMA, MICHAEL A.;IZATT, JOSEPH A.;ELLERBEE, AUDREY;SARUNIC, MARINKO
发明人
CHOMA, MICHAEL A.;IZATT, JOSEPH A.;ELLERBEE, AUDREY;SARUNIC, MARINKO