| 摘要 |
<p>An apparatus and method for cleaning objects using plasma are disclosed. The apparatus provides a plurality of elongated dielectric barrier members arranged adjacent each other; a first set of electrodes arranged to be coupled to a voltage source at a first voltage, each electrode of the first set contained within, and extending substantially along the length of, a first set of the elongated dielectric barrier members; and a second set of electrodes arranged to be coupled to a voltage source at a second voltage, each electrode of the second set contained within, and extending substantially along the length of, a second set of the elongated dielectric barrier members; whereby, when the first and second voltages are applied, dielectric barrier discharges are created to form plasma between adjacent elongated dielectric barrier members for cleaning at least a portion of the objects. The method provides a plurality of elongated dielectric barrier members having a first and second set of electrodes arranged therein; introducing the objects proximate the elongated dielectric barrier members; and generating a dielectric barrier discharge to form plasma between the elongated dielectric barrier members for cleaning at least a portion of each of the objects.</p> |
