| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a clamping device and a clamping method by which even a workpiece having a thickness likely to generate warpage can be surely fixed on a stage and a workpiece can be fixed even if energization is reduced or shut off. <P>SOLUTION: The clamping device is provided with: a rotary member 46 rotated by a driving source 40; a first link arm 52, in which one end part is pivotally supported and connected to a position deviating from the rotation center of the rotary member; a second link arm 54, in which one end part is pivotally supported and connected to the other end part of the first link arm; an operating member 60, which is pivotally supported and connected to the other end part of the second link arm and moved by the rotation of the rotary member; and a clamp claw 80 which is turned by the movement of the operating member and takes a clamping posture for pressing the edge end part 100A of the workpiece or an unclamping posture for separating from the edge end part of the workpiece. When the rotation center of the rotary member, and the one end part and other end part of the first link arm pivotally supported and connected are arranged on a straight line, the clamp claw takes the clamping posture. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
