| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a chalcopyrite thin film solar cell capable of realizing improvement of the photoelectric conversion efficiency, and to provide a manufacturing method thereof. <P>SOLUTION: The method for manufacturing the chalcopyrite thin film solar cell includes a precursor forming step of forming a precursor layer 4 including Cu, In, and Ga onto an Mo electrode layer 2 formed on a soda lime glass substrate 1 by the sputtering method, a seleniumized step by applying heat treatment to the substrate in a H<SB>2</SB>Se gas atmosphere within a temperature range higher than 500°C and lower than the melting point of the substrate to form a light absorbing layer 4, a buffer layer forming step of forming an n-type buffer layer 5 including InAlS on the light absorbing layer 4, and a transparent electrode layer forming step of forming a transparent electrode layer 6 on the buffer layer 5. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
