| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of manufacturing an industrial product in which the evaluation at each step of manufacturing process is accurate and can be applied substantially. <P>SOLUTION: The method includes a step in which actual patterns 112<SB>j-2</SB>, 112<SB>j-1</SB>, 112<SB>j</SB>, 112<SB>j+1</SB>, and 112<SB>j+2</SB>, constituting a part of industrial product are formed on the surface of base body to be processed by utilizing a lithography process with an actual mask of an industrial product, a step for forming an insulating film for changing wiring on the actual pattern, a step in which a plurality of contact holes for extracting potential 113<SB>j-2</SB>, 113<SB>j-1</SB>, 113<SB>j</SB>, 113<SB>j+1</SB>, and 113<SB>j+2</SB>are opened by selectively removing a part of the insulating film for changing wiring so that a part of the actual pattern is exposed, a step for forming a plurality of lead wirings for evaluation 111<SB>i</SB>and 111<SB>i+1</SB>which are electrically connected to the actual pattern by way of the contact hole for extracting potential, and a step for electrically detecting pattern defects of the actual pattern using the lead wiring for evaluation. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
