Poliervorrichtung

摘要

The polishing machine is capable of evenly applying a pressing force from an upper polishing plate (10) to work pieces (W) accommodated in through-holes (28) of carriers (26). The polishing machine comprises: a plurality of the carriers (26) provided around a center of gravity of the upper polishing plate (10) and sandwiched between the polishing plates (10, 12). Circular motion of the carriers (26), without revolving, are performed independently. Centers of gravity of the work pieces (W), which are held by the carriers (26), are simultaneously moved close to a center of gravity of the upper polishing plate (10) and simultaneously moved away therefrom, and moving distances of the centers of gravity of the work pieces (W) are equal.