| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a pattern formation method enhancing uniformness of a pattern shape by making a drying environment of a liquid drop relative to a substrate surface uniform and enhancing its productivity, a pattern formation device, a production method for a color filter, a color filter, a production method for an electro-optical device and an electro-optical device. <P>SOLUTION: A first pressure-reduction chamber 31 communicatable with a storage chamber 22 for storing a transparent substrate 2 is provided just above an element formation surface 2s, a first communication passage (suction hole 33 and discharge hole 29) for communicating the storage chamber 22 and the first pressure-reduction chamber 31 is formed at a size opposed to the element formation surface 2s and further, a volume of a first pressure-reduction chamber 32 in the first pressure-reduction chamber 31 is formed at a larger volume than that of the storage chamber 22. Further, a pressure in the first pressure-reduction chamber 32 is adjusted to a first target pressure for previously pressure-reduction-drying the liquid drop. When the liquid drop 18 is dried, a first valve 29V is opened to communicate the storage chamber 22 and the first pressure-reduction chamber 32. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
