| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and device used for inspecting the surface of a workpiece by using light reflected from the surface of the workpiece. SOLUTION: This optical test head is equipped with a block of material with a plurality of optical paths extending therethrough. At least one of the optical paths is an input optical path for receiving laser light and holding a lens for focusing the laser light on a workpiece that is proximate to the head. At least another of the optical paths is an output path for receiving light that is reflected off of a substrate and providing that light to a detector. (In one embodiment, a multitude of detectors are provided to direct specularly reflected light, narrow angle scattered light, wide angle scattered light, and back scattered light to associated detectors.) Other optical elements can be affixed within or to the block of material. The test head can be used without requiring the individual optical elements to be aligned or adjusted. COPYRIGHT: (C)2006,JPO&NCIPI
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