| 摘要 |
PROBLEM TO BE SOLVED: To provide a transparent electrode that does not use indium, which is superior in alkaline resistance and wet heating stability, and moreover, is also superior in etching characteristics. SOLUTION: This transparent electrode has zinc oxide and tin oxide as the main components, and has a taper angle of an electrode end part being 30 to 89°. The ratio of zinc atom (Zn/(Zn+Sn), the atomic ratio), with respect to the total amount of the zinc atom and the tin atom in this transparent electrode, is preferably in the range of 0.5 to 0.85. COPYRIGHT: (C)2006,JPO&NCIPI
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