| 摘要 |
<p>A method and apparatus for cleaning and surface conditioning objects using plasma is disclosed. One embodiment of the method discloses providing a plurality of elongated dielectric barrier members arranged adjacent each other, the members having electrodes connected therein, introducing the objects proximate the members, and producing a dielectric barrier discharge to form plasma between the objects and the members for cleaning the objects. One embodiment of the apparatus for cleaning objects using plasma discloses a plurality of elongated dielectric barrier members arranged adjacent each other, and a plurality of electrodes, each contained within, and extending substantially along the length of, respective ones of the elongated dielectric barrier members.</p> |
