| 摘要 |
PROBLEM TO BE SOLVED: To provide a high-strength alumina member in which a power-supplied member and a terminal are firmly bonded to each other. SOLUTION: An electrostatic chuck 10 comprises a base 11 made of a sintered body containing alumina, an electrode 12 which is a power-supplied member embedded in the base 11 and supplied with electric power, a bonding member 13 embedded in the base 11 and bonded to the electrode 12, and a terminal 14 bonded to the electrode 12 through the bonding member 13. The difference in thermal expansion coefficient between the bonding member 13 and the sintered body is 2×10<SP>-6</SP>/K or less, and the melting point of the bonding member 13 is higher than the sintering temperature of the sintered body. COPYRIGHT: (C)2006,JPO&NCIPI |
