| 摘要 |
PROBLEM TO BE SOLVED: To provide a solvent removing device and a solvent removing method capable of preventing (or suppressing) drying marks when removing a solvent from a coat of a liquid material provided on a workpiece. SOLUTION: The solvent removing device 1 is provided with a workpiece supporting means for supporting the workpiece provided with the coat 31 of the liquid material, a heating means for heating the workpiece, a gas jetting means having a storage chamber 66 temporarily storing gas and a plurality of nozzles communicated with the storage chamber 66, and a gas supplying means 7 for supplying the gas to the storage chamber 66. It is characterized by that it is composed such that the workpiece is heated by the heating means, the gas is jetted from the plurality of nozzles, and the gas is sprayed on the coat 31 to remove the solvent from the coat 31. COPYRIGHT: (C)2006,JPO&NCIPI
|
