摘要 |
A space transformer and a method for making the space transformer. An electrically conductive material is placed in an inner region located in a silicon medium, the silicon medium defining both a first side and a second side at an outer region thereof Electrical contact is established between the electrically conductive material in the inner region and both the first side and the second side of the silicon medium at the outer region to provide double-sided electrical contacts for the space transformer.
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