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发明名称
Method for dry cleaning dust soiled objects for carrying and keeping semi-conductor wafers
摘要
申请公布号
EP0813230(B1)
申请公布日期
2006.07.26
申请号
EP19970109257
申请日期
1997.06.07
申请人
MICRONAS SEMICONDUCTOR HOLDING AG
发明人
STROH, RUEDIGER JOACHIM, DIPL.-ING.;SCHWEINOCH, BOZENKA;TREFZER, MARTIN;THOMAS, UWE;ALLMANN, ERICH;COAD, CRAID
分类号
H01L21/00;B08B5/02;B08B9/08;B08B9/34
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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