发明名称 Device for highly accurate generation and measurement of forces and displacements
摘要 <p>The device has a force transmitting shaft (3) fixed at two flat springs that are fixed under pre-stressing and are clamped at two sides, where springs are prestressed in the direction of Y-axis. The prestressing is adjustable by a tensioning unit, and the flat springs are moved in a x-direction. A frame is supported at the flat spring. Another set of flat springs is also moved in the X-direction. The frame is connected with a movable unit by a connecting shaft.</p>
申请公布号 EP1684059(A2) 申请公布日期 2006.07.26
申请号 EP20060001411 申请日期 2006.01.24
申请人 ASMEC ADVANCED SURFACE MECHANICS GMBH 发明人 CHUDOBA, THOMAS, DR.;LINSS, VOLKER, DR.
分类号 G01N3/42;G01N3/46 主分类号 G01N3/42
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