发明名称 |
Device for highly accurate generation and measurement of forces and displacements |
摘要 |
<p>The device has a force transmitting shaft (3) fixed at two flat springs that are fixed under pre-stressing and are clamped at two sides, where springs are prestressed in the direction of Y-axis. The prestressing is adjustable by a tensioning unit, and the flat springs are moved in a x-direction. A frame is supported at the flat spring. Another set of flat springs is also moved in the X-direction. The frame is connected with a movable unit by a connecting shaft.</p> |
申请公布号 |
EP1684059(A2) |
申请公布日期 |
2006.07.26 |
申请号 |
EP20060001411 |
申请日期 |
2006.01.24 |
申请人 |
ASMEC ADVANCED SURFACE MECHANICS GMBH |
发明人 |
CHUDOBA, THOMAS, DR.;LINSS, VOLKER, DR. |
分类号 |
G01N3/42;G01N3/46 |
主分类号 |
G01N3/42 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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