发明名称 Interferometer with high insensitivity to angular errors
摘要 The present invention relates to an interferometer, comprising at least a beamsplitter (10), at least one end reflector (11) for returning beams (S2, S3), and a set of reflectors (14, 15) for reflecting the beams (S2, S3) between the beamsplitter (10) and the end reflector (11) or the end reflectors, at least some of said set of reflectors (14, 15) being adapted to be rotatable around an axis (ω). Said set of reflectors comprises two angle reflectors (14, 15), constituted by plane reflectors, and the said end reflector (11) is or the end reflectors are an angle reflector constituted by plane reflectors (11′, 11″). An angle line of the end reflector (11) is or the angle lines of end reflectors are arranged perpendicular to an angle line of both of the angle reflectors (14, 15).
申请公布号 EP1682850(A1) 申请公布日期 2006.07.26
申请号 EP20040791430 申请日期 2004.10.29
申请人 NOVELTECH SOLUTIONS OY 发明人 KAUPPINEN, JYRKI
分类号 G01J3/26;G01B9/02 主分类号 G01J3/26
代理机构 代理人
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