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摘要
申请公布号
JP3801582(B2)
申请公布日期
2006.07.26
申请号
JP20030190210
申请日期
2003.07.02
申请人
发明人
分类号
C23C16/08;H01L21/285;C23C16/448;H01L21/28
主分类号
C23C16/08
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