Method of etching thin layer preventing surface roughness,申请号KR19990066018-传众专利搜索

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发明名称	Method of etching thin layer preventing surface roughness
摘要
申请公布号	KR100604798(B1)	申请公布日期	2006.07.26
申请号	KR19990066018	申请日期	1999.12.30
申请人		发明人
分类号	H01L21/3065	主分类号	H01L21/3065
代理机构		代理人
主权项
地址

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