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发明名称
TRENCH ISOLATION FOR MICROMECHANICAL DEVICES
摘要
申请公布号
EP1062684(A4)
申请公布日期
2006.07.26
申请号
EP19990903085
申请日期
1999.01.14
申请人
CORNELL RESEARCH FOUNDATION, INC.
发明人
ADAMS, SCOTT, G.;SHAW, KEVIN, A.;WEBB, RUSSELL, Y.;REED, BRYAN, W.;MACDONALD, NOEL, C.;DAVIS, TIMOTHY, J.
分类号
B81C1/00;B81B3/00;H01L21/76;H01L21/762;H01L29/84;(IPC1-7):H01L21/00
主分类号
B81C1/00
代理机构
代理人
主权项
地址
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