发明名称 Passivation structure for semiconductor devices
摘要 A system and method for providing a passivation structure for semiconductor devices is provided. In an embodiment, the passivation structure comprises a first barrier layer and a second barrier layer, wherein the second barrier layer may comprise a material, such as cobalt and/or nickel, that is less pure than the first barrier layer. In another embodiment, a single gradient barrier layer is formed. In this embodiment the single gradient barrier layer exhibits a greater pure conductive material, such as cobalt and/or nickel, nearer the conductive line than near the surface.
申请公布号 SG123654(A1) 申请公布日期 2006.07.26
申请号 SG20050003172 申请日期 2005.05.20
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. 发明人 SU HUNG-WEN;SHIH CHIEN-HSUEH;TSAI MING-HSING;SHUE SHAU-LIN;YU CHEN-HUA
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