发明名称 CMOS constructions
摘要 The invention includes methods of forming circuit devices. A metal-containing material comprising a thickness of no more than 20 Å (or alternatively comprising a thickness resulting from no more than 70 ALD cycles) is formed between conductively-doped silicon and a dielectric layer. The conductively-doped silicon can be n-type silicon and the dielectric layer can be a high-k dielectric material. The metal-containing material can be formed directly on the dielectric layer, and the conductively-doped silicon can be formed directly on the metal-containing material. The circuit device can be a capacitor construction or a transistor construction. If the circuit device is a transistor construction, such can be incorporated into a CMOS assembly. Various devices of the present invention can be incorporated into memory constructions, and can be incorporated into electronic systems.
申请公布号 US7081656(B2) 申请公布日期 2006.07.25
申请号 US20040757252 申请日期 2004.01.13
申请人 MICRON TECHNOLOGY, INC. 发明人 EPPICH DENISE M.;WEIMER RONALD A.
分类号 H01L29/76;H01L21/02;H01L21/28;H01L21/8242;H01L27/06;H01L27/108;H01L29/49;H01L29/51;H01L29/94;H01L31/062;H01L31/113;H01L31/119 主分类号 H01L29/76
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