PATTERN FORMING METHOD OF FINE METAL THIN LAYER, BIOMOLECULAR FIXING SUBSTRATE AND BIOCHIP USING THE SAME

摘要

Provided is a linker functional group patterning method for biomolecule immobilization. The patterning method includes preparing a coating composition including a hydrophobic group-containing silane compound and a hydrophilic group-containing silane compound; forming a surface tension control layer by coating the coating composition on a substrate for biomoleucle immobilization; and forming a linker functional group pattern on the surface tension control layer using a coating composition including a linker functional group-containing compound followed by thermal treatment. The linker functional group pattern is formed in a uniform size and distribution and contains high-density linker functional groups.