| 摘要 |
A spectrometer is configured by using a photodetector 1 B which comprises a semiconductor substrate 10 having an upper surface 10 a, a photodiode array 11 having a plurality of photodiodes 12 aligned on the upper surface 10 a of the substrate 10 , and a light input section 13 including an opening formed in a predetermined positional relationship to the photodiode array 11 ; and a main body 2 having a plate portion 20 and support portions 21 and 22 mounted on the substrate 10 of the photodetector 1 B. The spectrometer is provided with a lens 23 protruded from a lower face 20 b of the plate portion 20 and a planar aberration-reduced blazed reflection diffraction grating 24 provided on an upper face 20 a of the plate portion 20 for separating incident light having entered through the light input section 13 and passed through the lens 23 into its spectral components, and configured to detect the spectral components with the photodiode array 11 . Thus, a photodetector capable of improving the positioning accuracy of components when it is applied to a spectrometer and the spectrometer using the same are realized.
|
