发明名称 |
ACCELERATION SENSOR |
摘要 |
An acceleration sensor includes a mass and a supporting member linked by a flexible beam. A strain detector having low-resistance areas at both ends is formed near a boundary between the beam and the mass or between the beam and the supporting member. A dielectric film formed on the supporting member and the beam has multiple contact holes disposed over each low-resistance area. Wiring formed on the dielectric film is connected to the low-resistance areas through the contact holes. The provision of multiple contact holes for each low-resistance area extends the life of the acceleration sensor by preventing sensor failure due to the separation or other failure of any single contact. |
申请公布号 |
KR20060084781(A) |
申请公布日期 |
2006.07.25 |
申请号 |
KR20050101174 |
申请日期 |
2005.10.26 |
申请人 |
OKI ELECTRIC INDUSTRY CO., LTD. |
发明人 |
KAI TAKAYUKI |
分类号 |
G01P15/09;G01P15/12;G01P15/18;H01L29/84 |
主分类号 |
G01P15/09 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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