发明名称 |
Method and apparatus for automatically measuring the concentration of TOC in a fluid used in a semiconductor manufacturing process |
摘要 |
The present invention relates to a method and apparatus for automatically measuring the concentration of total organic carbon (TOC) in chemicals and ultra-pure water that are used in a wet etch process. The apparatus includes a sampling line extending from a processing bath, and a pump, for extracting a fluid sample from the processing bath, a buffer for filtering foreign material or air bubbles from the fluid, and an analyzer for analyzing the concentration of TOC in the fluid.
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申请公布号 |
US7081182(B2) |
申请公布日期 |
2006.07.25 |
申请号 |
US20020205621 |
申请日期 |
2002.07.26 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
RYU JAE-JUN;KIM KYUNG-DAE;GILL JUNE-ING;HEO YONG-WOO |
分类号 |
C23F1/00;H01L21/304;H01L21/306;H01L21/66 |
主分类号 |
C23F1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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